UHV H-9000 TEM

The Hitachi UHV-H9000 High-Resolution Electron Microscope was the first conventional transmission instrument to achieve routine operation at mid-10^-11 torr. Sample contamination is minimal, which is especially crucial in surface studies. Several instruments in Japan, IBM and MIT were copies of the design.

This custom-made microscope was equipped with a Gatan Parallel EELS and CCD Camera, both interfaced to computers. Routinely the instrument will attain resolutions of ~0.18 nm for bulk spacings and ~0.25 nm for the atomic-scale structure determination in surfaces.

The UHV-H9000 was interfaced to the unique SPEAR system, which allowed for preparation, treatment and characterization of samples in UHV without ever having to expose them to air.

The instrument was retired in 2023, although parts of the vacuum system have found other homes.

Some Examples of Results under UHV conditions

High resolution micrograph of hexagonal BN.	Individual Ag particles on Si(100) surface	Phase map of Ag on Si(100) surface	High resolution micrograph of Si(111) 5x2 Au reconstruction
Nanoarches of hexagonal BN	Diffraction pattern of Ge(111)-4x4 Ag reconstruction	Diffraction pattern of Ag on Si(100) surface	Diffraction pattern of Si(111) 5x2 Au reconstrution

(Click to enlarge)